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1:华南理工大学
Published:1995
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Study on Measurement of Thickness and Refractive Index of Rough Surface Films by Using Euipsametry[J]. 1995, (3).
DOI:
Study on Measurement of Thickness and Refractive Index of Rough Surface Films by Using Euipsametry[J]. 1995, (3). DOI:
本文阐述了漫反射系数和粗糙面薄膜的厚度,寻出了漫反射椭偏测量术的方程,实用中测量了湿敏元件的湿敏薄膜厚度。
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