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1:清华大学精仪系
Published:1996
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An automatic light-tuning control scheme for measuring parallelism and prependicularity of large workpieces[J]. 1996, (5).
DOI:
An automatic light-tuning control scheme for measuring parallelism and prependicularity of large workpieces[J]. 1996, (5). DOI:
依据改变线性CCD的积分时间可调节其曝光量的特点,将CCD的曝光量即其输出的测量信号控制在某一可调的目标电平上,使得采用线阵CCD的平行度垂直度测量仪能够在很大的测量范围内准确测量,而不会出现CCD饱和等现象。
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