Study of periodic thickness of multilayer optical  thin films by double  crystal grazing incident X  ray

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Study of periodic thickness of multilayer optical thin films by double crystal grazing incident X ray

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- Study of periodic thickness of multilayer optical thin films by double crystal grazing incident X ray
- Issue 5, (1998)
- 作者机构：
  
  1:长春光学精密机械学院高功率半导体激光国家重点实验室
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1998
- 稿件说明：
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Study of periodic thickness of multilayer optical thin films by double crystal grazing incident X ray[J]. 1998, (5).
DOI：

Study of periodic thickness of multilayer optical thin films by double crystal grazing incident X ray[J]. 1998, (5). DOI：

阐述了掠入射Ｘ射线测量薄膜厚度的条件，讨论和分析了掠入射Ｘ射线测量多层薄膜厚度的干涉原理和方法。利用双晶Ｘ射线衍射仪对多层光学薄膜的周期厚度进行了掠入射小角度测量，获得了令人满意的结果，测量值与设计值极好地吻合。

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