Study of transmittance gas sensitive SnO<sub>2</sub> thin film prepared by magnetic reactive sputtering

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Study of transmittance gas sensitive SnO₂ thin film prepared by magnetic reactive sputtering

更新时间：2025-09-01

- Study of transmittance gas sensitive SnO₂ thin film prepared by magnetic reactive sputtering
- Issue S1, Pages: 160-161(2007)
- 作者机构：
  
  1:华南理工大学物理科学与技术学院
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：2007
- 稿件说明：
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Study of transmittance gas sensitive SnO₂ thin film prepared by magnetic reactive sputtering[J]. 2007, (S1): 160-161.
DOI：

Study of transmittance gas sensitive SnO₂ thin film prepared by magnetic reactive sputtering[J]. 2007, (S1): 160-161. DOI：

摘要

采用磁控射频溅射在玻璃基片上制备SnO2薄膜

对采用不同工艺制备的薄膜进行了XRD和常温下的膜片在CO2、乙醇中的气敏光学特性与透射光谱测试。结果表明

该薄膜在常温下对测试气体有敏感效应

会引起透射光谱的变化

并且光谱透射率的变化与波长相关。

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Related Institution

1:华南理工大学物理系

2:华南理工大学物理系

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3:军械工程学院弹药工程系

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Study of transmittance gas sensitive SnO2 thin film prepared by magnetic reactive sputtering

DOI：

摘要

Abstract

关键词

Keywords

references

Study of transmittance gas sensitive SnO₂ thin film prepared by magnetic reactive sputtering