Differential confocal fast surface measurement based on mirror image reconstruction

ZHU Ziteng; LIU Yuhan; ZHANG Xiaocheng; QIU Lirong

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Differential confocal fast surface measurement based on mirror image reconstruction

Beijing Institate of Technology 85th Anniversary | 更新时间：2025-09-22

- Differential confocal fast surface measurement based on mirror image reconstruction
- OPTICAL TECHNIQUE Vol. 51, Issue 5, Pages: 533-540(2025)
- 作者机构：
  
  北京理工大学光电学院，北京 100081
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP394.1;TH691.9
- Received：15 April 2025，
  
  Revised：2025-05-26，
  
  Published：20 September 2025
- 稿件说明：
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朱子腾,刘昱含,张晓程等.基于镜像重构的差动共焦快速曲面测量方法[J].光学技术,2025,51(05):533-540.

ZHU Ziteng,LIU Yuhan,ZHANG Xiaocheng,et al.Differential confocal fast surface measurement based on mirror image reconstruction[J].OPTICAL TECHNIQUE,2025,51(05):533-540.
朱子腾,刘昱含,张晓程等.基于镜像重构的差动共焦快速曲面测量方法[J].光学技术,2025,51(05):533-540. DOI：

ZHU Ziteng,LIU Yuhan,ZHANG Xiaocheng,et al.Differential confocal fast surface measurement based on mirror image reconstruction[J].OPTICAL TECHNIQUE,2025,51(05):533-540. DOI：

摘要

针对传统差动共焦方法测量复杂曲面精度和效率难以兼顾的问题，提出基于镜像重构的差动共焦快速曲面测量方法，首先对待测曲面进行先导式扫描，利用共焦曲线关于零点对称的特性进行曲线镜像重构，减少扫描行程，提高测量效率；进行精扫描，依据差动共焦曲线的过零点精确对应待测曲面特征点的特性，保证对曲面表面的高精度定焦。方法无需复杂的硬件改造，突破测量时对线性区间的依赖，经实验验证，所提方法所测面形结果的RMS值为13.8nm

保证了测量精度，且与传统方法所测表面误差主要特征分布接近，测量效率提高到传统方法的2倍以上，为复杂表面的快速精密测量提供一种新的有效途径。

Abstract

In response to the difficulty of balancing accuracy and efficiency in measuring complex surfaces using traditional differential confocal methods

a proposes a differential confocal rapid surface measurement method based on mirror reconstruction is proposed. Firstly

the surface to be measured is scanned in a pilot manner

and the curve mirror reconstruction is carried out using the symmetry of the confocal curve about the zero point to reduce the scanning stroke and improve measurement efficiency; Perform precise scanning based on the zero crossing point of the differential confocal curve to accurately correspond to the characteristics of the feature points of the measured surface

ensuring high-precision focusing of the surface. This method does not require complex hardware modifications and breaks through the dependence on linear intervals during measurement. Through experimental verification

the RMS value of the surface shape results measured by this method is 13.8nm

ensuring measurement accuracy and approaching the main characteristic distribution of surface errors measured by traditional methods. The measurement efficiency is improved by more than twice that of traditional methods

providing a new and effective approach for rapid and precise measurement of complex surfaces.

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references

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