Open Fabry-Pérot cavity with micrometer scale cavity length and its refractive index sensing characteristics

XU Chao; TIAN Qingye; FAN Feihu

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Open Fabry-Pérot cavity with micrometer scale cavity length and its refractive index sensing characteristics

Optical Devices & System Design | 更新时间：2025-10-09

- Open Fabry-Pérot cavity with micrometer scale cavity length and its refractive index sensing characteristics
- OPTICAL TECHNIQUE Vol. 51, Issue 4, Pages: 432-438(2025)
- 作者机构：
  
  1.中电智能科技有限公司，北京 102200
  2.西安工业大学光电工程学院，陕西西安 710021
- 作者简介：
- 基金信息：
- DOI：
  CLC： TB43
- Received：06 March 2025，
  
  Revised：2025-04-19，
  
  Published：20 July 2025
- 稿件说明：
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许超,田庆业,范飞虎.微米量级腔长的开式F-P腔研制及其折射率传感特性[J].光学技术,2025,51(04):432-438.

XU Chao,TIAN Qingye,FAN Feihu.Open Fabry-Pérot cavity with micrometer scale cavity length and its refractive index sensing characteristics[J].OPTICAL TECHNIQUE,2025,51(04):432-438.
许超,田庆业,范飞虎.微米量级腔长的开式F-P腔研制及其折射率传感特性[J].光学技术,2025,51(04):432-438. DOI：

XU Chao,TIAN Qingye,FAN Feihu.Open Fabry-Pérot cavity with micrometer scale cavity length and its refractive index sensing characteristics[J].OPTICAL TECHNIQUE,2025,51(04):432-438. DOI：

摘要

F-P谐振腔（Fabry-Pérot cavity）广泛用于折射率、温度、压力等传感，现有的基于光纤-谐振腔的封闭式F-P传感器因为谐振腔较长，限制了待测物质种类及其测量范围。基于薄膜技术研制了短腔长的开式F-P折射率传感器，具备宽测量范围和高灵敏度。理论研究了腔镜反射率和腔长对开式F-P腔特性参数的影响规律，设计开式F-P谐振腔折射率传感器，包含上下高反射率腔镜（99.7%）和短腔（3.305μm），仿真结果表明，其自由光谱范围高达42nm，折射率测量范围高于传统F-P腔一个数量级，达到0.129 RIU（RIU为折射率单位）。采用电子束热蒸发薄膜沉积和光刻技术研制了折射率传感器，并搭建折射率测试验证装置，开展了折射率测试实验。结果表明，折射率变化导致的中心波长平均改变1.79 nm/RIU，测试灵敏度为346.65nm/RIU。该研究为低成本、宽测量范围、高精度液体/气体折射率传感器奠定理论和实践基础。

Abstract

F-P optical resonant cavity （Fabry-Pérot cavity） is widely used for sensing refractive index

temperature

pressure

etc. The closed fiber F-P resonant cavity limits the types of substances to be measured and their measurement range due to the long resonant cavity. Herein

a short cavity length open F-P refractive index sensor was designed and fabricated based on thin film technology and lithography

which definitely increases the measurement range and high sensitivity

and is suitable for gases and liquids. Theoretical research was conducted on the influence of mirror reflectivity and cavity length on the sensitive parameters of open F-P cavity

and an open F-P resonant cavity structure and characteristics were all determined

including upper and lower high reflectivity mirrors （99.7%） and short cavity length （3.305 μm）. The FDTD simulation results showed that its free spectral range was as high as 42nm

the sensitivity was as high as 385.85nm per Refractive Index Unit （RIU）

and the refractive index measurement range was one order of magnitude higher than traditional F-P cavities

reaching to 0.129RIU. In addition

a refractive index testing and verification system was built

and refractive index testing experiments were all carried out. Experimental verification showed that the greater the change in refractive index

the greater the shift in the center wavelength. The average change in the center wavelength was 1.79 nm/RIU

and the experimental sensitivity was determined to 346.65 nm/RIU. The results lay a theoretical and practical foundation for low-cost

wide measurement range

and high-precision liquid/gas refractive index sensors.

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references

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