A robust zero-phase joint extraction method for quasi-static deformation signals in optomechanical structures

ZHU Zhangzhi; LI Kekai; LEI Xin; TAO Ye

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A robust zero-phase joint extraction method for quasi-static deformation signals in optomechanical structures

Optical Sensing and Measurement | 更新时间：2026-05-20

- A robust zero-phase joint extraction method for quasi-static deformation signals in optomechanical structures
- OPTICAL TECHNIQUE Vol. 52, Issue 3, Pages: 288-294(2026)
- 作者机构：
  
  四川大学机械工程学院，四川成都 610065
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH-39;TH744
- Received：27 March 2026，
  
  Revised：2026-04-09，
  
  Published：20 May 2026
- 稿件说明：
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朱张志,李克凯,雷新等.光机结构准静态形变信号鲁棒零相位联合提取法研究[J].光学技术,2026,52(03):288-294.

ZHU Zhangzhi,LI Kekai,LEI Xin,et al.A robust zero-phase joint extraction method for quasi-static deformation signals in optomechanical structures[J].OPTICAL TECHNIQUE,2026,52(03):288-294.
朱张志,李克凯,雷新等.光机结构准静态形变信号鲁棒零相位联合提取法研究[J].光学技术,2026,52(03):288-294. DOI：

ZHU Zhangzhi,LI Kekai,LEI Xin,et al.A robust zero-phase joint extraction method for quasi-static deformation signals in optomechanical structures[J].OPTICAL TECHNIQUE,2026,52(03):288-294. DOI：

摘要

超精密光学系统中，光机结构组件将随环境温度变化发生微小形变，此类形变极易导致系统性能衰退。这主要是材料的热膨胀形变与内部应力松弛等本征响应共同作用的结果。当叠加外界高频振动干扰时，系统将形成更复杂的混合信号。因此，从热膨胀和本征形变耦合形成的低频真实形变信号中，有效滤除高频振动干扰信号，是获得高精度真实形变信号的前提。文章以超精密应变监测仪光机结构为对象，提出一种鲁棒局部加权回归与零相位四阶巴特沃斯滤波器协同作用下的准静态形变信号鲁棒零相位联合提取法，精确还原其真实形变过程。方法相较于均值滤波和小波分析，均方根误差分别降低45.8%和41.3%，去噪噪声标准差分别降低20.7%和21.5%，过滤振动信号效果优于传统滤波方法。此方法对超精密光学系统环境适应性和测量精度有重要意义和应用价值。

Abstract

In ultra-precision optical systems

optomechanical structures undergo slight deformation with ambient temperature changes

which can degrade system performance. This deformation mainly results from the combined effects of thermal expansion and intrinsic stress relaxation. When external high-frequency vibration is superimposed

the measured signal becomes more complex. Therefore

effective removal of high-frequency vibration from the low-frequency true deformation signal is essential for accurate deformation measurement. Focusing on the optomechanical structure of an ultra-precision strain monitoring instrument

this study proposes a robust joint extraction method that combines locally weighted regression （LOWESS） with a zero-phase fourth-order Butterworth filter to recover the quasi-static deformation signal. Compared with mean filtering and wavelet analysis

the proposed method reduces the root-mean-square error by 45.8% and 41.3%

respectively

and lowers the standard deviation of denoised noise by 20.7% and 21.5%. It also shows better suppression of vibration components than conventional filtering methods. This method is of practical significance for improving the environmental adaptability and measurement accuracy of ultra-precision optical systems.

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references

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