SiN<sub>x</sub>/SiO<sub>x</sub> multilayer stacks as flexible OLED substrates for automotive tail lights

KANG Jianxi; ZHU Yingguang; ZHANG Wen; SUN Huilan

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SiN_x/SiO_x multilayer stacks as flexible OLED substrates for automotive tail lights

Optical Devices & System Design | 更新时间：2026-07-23

- SiN_x/SiO_x multilayer stacks as flexible OLED substrates for automotive tail lights
- OPTICAL TECHNIQUE Vol. 52, Issue 4, Pages: 397-402(2026)
- 作者机构：
  
  1.固安翌光科技有限公司，河北廊坊 065000
  2.河北科技大学，河北省柔性功能材料重点实验室，河北石家庄 050018
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP32
- Received：02 April 2026，
  
  Revised：2026-05-14，
  
  Accepted：22 May 2026，
  
  Online First：23 July 2026，
  
  Published：20 July 2026
- 稿件说明：
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康建喜,朱映光,张文等.用于柔性OLED汽车尾灯的SiN_x/SiO_x多层堆叠衬底[J].光学技术,2026,52(04):397-402.

KANG Jianxi,ZHU Yingguang,ZHANG Wen,et al.SiN_x/SiO_x multilayer stacks as flexible OLED substrates for automotive tail lights[J].OPTICAL TECHNIQUE,2026,52(04):397-402.
康建喜,朱映光,张文等.用于柔性OLED汽车尾灯的SiN_x/SiO_x多层堆叠衬底[J].光学技术,2026,52(04):397-402. DOI：

KANG Jianxi,ZHU Yingguang,ZHANG Wen,et al.SiN_x/SiO_x multilayer stacks as flexible OLED substrates for automotive tail lights[J].OPTICAL TECHNIQUE,2026,52(04):397-402. DOI：

摘要

为解决柔性有机发光二极管（OLED）汽车尾灯用衬底难以兼顾高阻隔、高透光与良好弯曲性能的难题，文章采用等离子体增强化学气相沉积技术在聚酰亚胺上制备SiN

/SiO

多层堆叠衬底，系统调控堆叠周期数与沉积温度。结果表明当周期数为4、沉积温度为280℃时，水汽透过率达1.0×10

-6

g·m

-2

·day

-1

，600~650nm波段平均透过率为89.99%，10mm弯曲半径循环100次后无损伤。基于该衬底的柔性OLED在85℃、85%相对湿度、2000cd/m

下连续工作2000小时未出现失效。所开发的SiN

/SiO

多层堆叠衬底满足汽车尾灯对高环境稳定性与长寿命的严苛要求，在车载柔性照明领域具有重要应用前景。

Abstract

To address the challenge that flexible organic light-emitting diode （OLED） substrates for automotive taillights cannot simultaneously achieve high barrier property

high transparency

and good bending performance

a SiN

/SiO

multilayer stacked substrate was prepared on polyimide by plasma-enhanced chemical vapor deposition

and t

he stacking cycle number and deposition temperature were systematically tuned. The results show that with 4 cycles and a deposition temperature of 280°C

the water vapor transmission rate reaches 1.0×10

-6

g·m

-2

·day

-1

the average transmittance in the 600~650nm band is 89.99%

and no damage is observed after 100 bending cycles at a radius of 10 mm. Flexible OLED fabricated on this substrate exhibit no failure after continuous operation for 2000 h under conditions of 85°C

85% relative humidity

and 2000cd/m

. The developed SiN

/SiO

multilayer stacked substrate meets the stringent requirements of automotive taillights for high environmental stability and long lifetime

showing significant application prospects in vehicle-mounted flexible lighting.

关键词

Keywords

references

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⁰

SiNx/SiOx multilayer stacks as flexible OLED substrates for automotive tail lights

DOI：

摘要

Abstract

关键词

Keywords

references

SiN_x/SiO_x multilayer stacks as flexible OLED substrates for automotive tail lights