Development of a high-resolution white-light interference and confocal microscopic sensor for three-dimensional surface topography measurement

YANG Rui; HE Jiayi; YU Fulu; YANG Yiming; YANG changyun; YANG shuai

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Development of a high-resolution white-light interference and confocal microscopic sensor for three-dimensional surface topography measurement

Optical Sensing and Measurement | 更新时间：2026-07-23

- Development of a high-resolution white-light interference and confocal microscopic sensor for three-dimensional surface topography measurement
- OPTICAL TECHNIQUE Vol. 52, Issue 4, Pages: 434-442(2026)
- 作者机构：
  
  北京理工大学光电学院北京 100081
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP394.1;TH691.9
- Received：21 April 2026，
  
  Revised：2026-05-14，
  
  Accepted：19 May 2026，
  
  Online First：23 July 2026，
  
  Published：20 July 2026
- 稿件说明：
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杨瑞,贺佳怡,于福禄等.高分辨白光干涉-共焦显微三维形貌测量传感器研制[J].光学技术,2026,52(04):434-442.

YANG Rui,HE Jiayi,YU Fulu,et al.Development of a high-resolution white-light interference and confocal microscopic sensor for three-dimensional surface topography measurement[J].OPTICAL TECHNIQUE,2026,52(04):434-442.
杨瑞,贺佳怡,于福禄等.高分辨白光干涉-共焦显微三维形貌测量传感器研制[J].光学技术,2026,52(04):434-442. DOI：

YANG Rui,HE Jiayi,YU Fulu,et al.Development of a high-resolution white-light interference and confocal microscopic sensor for three-dimensional surface topography measurement[J].OPTICAL TECHNIQUE,2026,52(04):434-442. DOI：

摘要

针对单一测量模式难以同时满足不同复杂微纳结构的高空间分辨成像检测问题，提出了基于白光干涉与共焦双光路融合原理的高分辨三维形貌成像检测方法。方法通过分光棱镜与共用管镜实现白光/激光照明/探测光路的同轴合束与空间复用，并引入振镜实现共焦模式下的横向快速扫描。系统可实现两种测量模式的原位切换，以白光干涉技术实现大范围形貌的纳米级测量，以共焦技术实现复杂边缘的精细定位，从而将白光干涉的高轴向分辨力优势与共焦技术的高横向分辨力特性相结合，实现了针对不同微纳结构的高精度三维形貌测量。基于该方法研制了小型化多模式白光干涉-共焦测量传感器系统，实验结果表明，系统可实现双模式三维形貌测量；光滑平面测试中轴向重复性小于2 nm，标准台阶光栅测试中高度标准差小于标称高度的2%。将白光干涉与共焦结合应用于微纳测量领域，为微纳结构三维形貌的高效、精密测量提供了参考。

Abstract

To address the difficulty of a single measurement mode in simultaneously meeting the high-spatial-resolution imaging and inspection requirements of diverse complex micro/nanostructures

a high-resolution three-dimensional topography imaging and measurement method based on the dual-optical-path integration of white-light interferometry and confocal microscopy is proposed. In this method

a beam-splitting prism and a shared tube lens are used to realize coaxial beam combination and spatial multiplexing of the white-light/laser illumination and detection paths

while a galvanometer is introduced to achieve rapid lateral scanning in the confocal mode. The system enables in situ switching between the two measurement modes. White-light interferometry is used for nanometer-scale measurement of large-area surface topography

whereas confocal microscopy is used for precise localization of complex edges. In this way

the high axial resolution of white-light interferometry is combined with the high lateral resolution of confocal microscopy

enabling high-precision three-dimensional topography measurement of different micro/nanostructures. Based on this method

a miniaturized multimode white-light-interferometry/confocal measurement sensor system was developed. Experimental results show that the system can realize dual-mode three-dimensional topography measurement. In the smooth-plane test

the axial repeatability was better than 2 nm

and in the standard step-grating test

the height standard deviation was less than 2% of the nominal height. The integration of white-light interferometry and confocal microscopy in micro/nano measurement provides a reference for efficient and precise three-dimensional topography measurement of micro/nanostructures.

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references

高思田 , 李琪 , 施玉书 , 等 . 我国微纳几何量计量技术的研究进展 [J ] . 仪器仪表学报 , 2017 , 38 （ 8 ）: 1822 — 1829 .

Gao Sitian , Li Qi , Shi Yushu , et al . Research progress of micro/nano geometric metrology technology in China [J ] . Chinese Journal of Scientific Instrument , 2017 , 38 （ 8 ）: 1822 — 1829 .

范松如 , 范朦 , 陈冬晖 , 等 . 基于时域相移技术的结构光三维微纳形貌检测方法 [J ] . 光电工程 , 2021 , 48 （ 4 ）: 200430 .

Fan Songru , Fan Meng , Chen Donghui , et al . Structured-light 3D micro/nano morphology measurement method based on temporal phase-shifting technology [J ] . Opto-Electronic Engineering , 2021 , 48 （ 4 ）: 200430 .

Wu Z , Li A , Xue R , et al . High-precision surface profilometry on a micron-groove based on dual-comb electronically controlled optical sampling [J ] . Applied Optics , 2023 , 62 : 8793 — 8797 .

De Groot P . Principles of interference microscopy for the measurement of surface topography [J ] . Advances in Optics and Photonics , 2015 , 7 （ 1 ）: 1 — 65 .

李桥林 , 刘健志 , 吴柏荣 , 等 . 微纳表面光学精密测量技术及仪器（特邀） [J ] . 激光与光电子学进展 , 2026 , 63 （ 05 ）: 50 — 84 .

Li Qiaolin , Liu Jianzhi , Wu Bairong , et al . Optical precision measurement technologies and instruments for micro/nano surfaces （Invited） [J ] . Laser & Optoelectronics Progress , 2026 , 63 （ 5 ）: 50 — 84 .

O'Mahony C , Hill M , Brunet M , et al . Characterization of micromechanical structures using white-light interferometry [J ] . Measurement Science and Technology , 2003 , 14 （ 10 ）: 1807 — 1814 .

马龙 , 李颖 , 郝敬堂 , 等 . 白光干涉信号相位噪声分析与抑制方法研究 [J ] . 计测技术 , 2026 , 46 （ 1 ）: 105 — 128 .

Ma Long , Li Ying , Hao Jingtang , et al . Analysis and suppression methods of phase noise in white-light interferometric signals [J ] . Metrology & Measurement Technique , 2026 , 46 （ 1 ）: 105 — 128 .

Lei Z , Liu X , Chen L , et al . A novel surface recovery algorithm in white light interferometry [J ] . Measurement , 2016 , 80 : 1 — 11 .

王代君 , 陈春根 , 朱丽华 , 等 . 白光干涉数据的三维去噪研究 [J ] . 光电工程 , 2015 , 42 （ 3 ）: 60 — 65 .

Wang Daijun , Chen Chungen , Zhu Lihua , et al . Three-dimensional denoising of white-light interferometric data [J ] . Opto-Electronic Engineering , 2015 , 42 （ 3 ）: 60 — 65 .

Lehmann P , Tereschenko S , Xie W . Fundamental aspects of resolution and precision in vertical scanning white-light interferometry [J ] . Surface Topography: Metrology and Properties , 2016 , 4 （ 2 ）: 024004 .

Zhang J , Yuan Q , Fan X , et al . Quantitative evaluation of the batwing effect on depth measurement in coherence scanning interferometry for rectangular gratings [J ] . Photonics , 2024 , 11 : 341 .

聂磊 , 谢怡君 , 徐怡心 , 等 . 白光干涉测量系统中的相位噪声抑制方法研究 [J ] . 光学学报 , 2025 , 45 （ 07 ）: 119 — 128 .

Nie Lei , Xie Yijun , Xu Yixin , et al . Research on phase noise suppression methods in white-light interferometric measurement systems [J ] . Acta Optica Sinica , 2025 , 45 （ 7 ）: 119 — 128 .

Ji C , Luo S , Sasaki O , et al . Exact surface measurement based on phase error insensitive method for white-light scanning interferometer [J ] . Surface Topography: Metrology and Properties , 2024 , 12 : 025025 .

Li Y , Yuan Q , Huo X , et al . Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches [J ] . Light: Science & Applications , 2026 , 15 : 93 .

青乐康 . 基于白光干涉的高精度形貌恢复技术研究 [D ] . 成都 : 电子科技大学 , 2025 .

Qing Lekang . Research on high-precision morphology reconstruction technology based on white-light interferometry [D ] . Chengdu : University of Electronic Science and Technology of China , 2025 .

Artigas M . Imaging confocal microscopy [M ] //Leach R. Optical Measurement of Surface Topography . Berlin : Springer , 2011 : 237 — 286 .

谭久彬 , 张杰 . 微型差动式共焦自聚焦光聚焦探测系统 [J ] . 光学学报 , 2003 , 23 （ 2 ）: 202 — 206 .

Tan Jiubin , Zhang Jie . Miniature differential confocal autofocusing optical detection system [J ] . Acta Optica Sinica , 2003 , 23 （ 2 ）: 202 — 206 .

杨帅 , 邱丽荣 , 汤亮 , 等 . 激光差动共焦干涉高精度测量技术及仪器 [J ] . 光学学报 , 2023 , 43 （ 15 ）: 46 — 54 .

Yang Shuai , Qiu Lirong , Tang Liang , et al . High-precision laser differential confocal interferometric measurement technology and instrument [J ] . Acta Optica Sinica , 2023 , 43 （ 15 ）: 46 — 54 .

Artigas R , Laguarta F , Cadevall C . Dual-technology optical sensor head for 3D surface shape measurements on the micro- and nanoscales [C ] // Optical Metrology in Production Engineering . Proceedings of SPIE , 2004 , 5457 : 166 .

深圳市中图仪器股份有限公司 . 一种用于实现两种表面三维轮廓测量的光学测量装置 : CN201920127563.5 [P ] . 2019-08—13 .

Shenzhen Zhongtu Instrument Co., Ltd . Optical measuring device for realizing two kinds of three-dimensional surface profile measurement : CN201920127563.5 [P ] . 2019-08-13 .

Niehues J , Lehmann P . Improvement of lateral resolution and reduction of batwings in vertical scanning white-light interferometry [C ] // Optical Measurement Systems for Industrial Inspection VII . SPIE , 2011 , 8082 : 278 — 285 .

Wang W , Gu K , You X , et al . Interference confocal microscope integrated with spatial phase shifter [J ] . Sensors , 2016 , 16 （ 9 ）: 1358 .

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