Synchronous detection method for geometric tolerance of free-form surfaces based on computer-generated holography

LIU Zeyu; ZHANG Haitao; LIU Yu; WU Donghang

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Synchronous detection method for geometric tolerance of free-form surfaces based on computer-generated holography

Optical Sensing and Measurement | 更新时间：2026-07-23

- Synchronous detection method for geometric tolerance of free-form surfaces based on computer-generated holography
- OPTICAL TECHNIQUE Vol. 52, Issue 4, Pages: 419-427(2026)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所，光学系统先进制造全国重点实验室，吉林长春 130033
  2.中国科学院大学，北京 100049
- 作者简介：
- 基金信息：
- DOI：
  CLC： O439
- Received：25 January 2026，
  
  Revised：2026-05-08，
  
  Accepted：13 May 2026，
  
  Online First：23 July 2026，
  
  Published：20 July 2026
- 稿件说明：
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刘泽禹,张海涛,刘钰等.基于计算全息的自由曲面形位误差同步检测方法[J].光学技术,2026,52(04):419-427.

LIU Zeyu,ZHANG Haitao,LIU Yu,et al.Synchronous detection method for geometric tolerance of free-form surfaces based on computer-generated holography[J].OPTICAL TECHNIQUE,2026,52(04):419-427.
刘泽禹,张海涛,刘钰等.基于计算全息的自由曲面形位误差同步检测方法[J].光学技术,2026,52(04):419-427. DOI：

LIU Zeyu,ZHANG Haitao,LIU Yu,et al.Synchronous detection method for geometric tolerance of free-form surfaces based on computer-generated holography[J].OPTICAL TECHNIQUE,2026,52(04):419-427. DOI：

摘要

提出了一种基于复合计算全息图（CGH）的原位解耦检测方法。方法在主检测全息图基础上，集成球形安装回射器（SMR）靶球、猫眼及平面基准等多种辅助对准区域，在同一视场内建立光学与机械的统一基准。利用SMR产生的柱面正交焦线与猫眼波前特征，构建了六自由度位姿解算模型，实现了在一次干涉测量中对面形误差与位姿偏差的同步分离。搭建了立式原位干涉检测装置。实验结果表明，所提出方法获得的自由曲面面形测量结果与高精度轮廓仪扫描结果在宏观形貌和特征结构上高度一致，验证了该方法在原位、同步形位检测中的可行性和稳定性。方法有效解决了自由曲面形位误差混杂的关键问题，为高端光学系统装调与误差预补偿提供了新的检测手段。

Abstract

An in-situ decoupling detection method based on composite computer-generated hologram （CGH） is proposed. On the basis of the main detection hologram

this method integrates various auxiliary alignment regions

including Sphere Mounted Retroreflector （SMR） target spheres

cat's eye reflectors

and planar references

establishing a unified optical and mechanical reference within the same field of view. By utilizing the orthogonal cylindrical focal lines generated by SMRs and the wavefront characteristics of the cat's eye reflectors

a six-degree-of-freedom （6-DoF） pose estimation model is constructed

enabling the simultaneous separation of surface form errors and positional deviations in a single interferometric measurement. A vertical in-situ interferometric detection setup was developed. Experimental results show that the freeform surface profiles obtained using the proposed method are highly consistent with those scanned by a high-precision profilometer

both in macroscopic topography and characteristic structures

verifying the method's feasibility and stability for in-situ and simultaneous form and position detection. This method effectively addresses the critical issue of mixed form and position errors in freeform surfaces

providing a new detection technique for the alignment and error pre-compensation of high-end optical systems.

关键词

Keywords

references

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