Surface defects of the optical elements measured   by the coherent filter imaging system

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Surface defects of the optical elements measured by the coherent filter imaging system

更新时间：2025-09-01

- Surface defects of the optical elements measured by the coherent filter imaging system
- Issue 4, Pages: 361-362(2000)
- 作者机构：
  
  1:中国科学院上海光学精密机械研究所,上海,201800
- 作者简介：
- 基金信息：
- DOI：10.13741/j.cnki.11-1879/o4.2000.04.023
  CLC：
- Published：2000
- 稿件说明：
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Surface defects of the optical elements measured by the coherent filter imaging system[J]. 2000, (4): 361-362.
DOI：

Surface defects of the optical elements measured by the coherent filter imaging system[J]. 2000, (4): 361-362. DOI： 10.13741/j.cnki.11-1879/o4.2000.04.023.

本文利用相干高通滤波成像系统对光学元件表面疵病进行了测量

提出了等效疵病面积的概念及计算公式

由等效疵病面积可计算出与 GB1185 - 89对应的疵病等级 J。实验装置的分辨率为 10μm

并具有可靠的表面疵病等级评价

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