High aspect ratio and resolution X-ray zoneplate fabrication using both electron beam and X-ray beam exposure technology[J]. 2000, (6): 524-525.
DOI:
High aspect ratio and resolution X-ray zoneplate fabrication using both electron beam and X-ray beam exposure technology[J]. 2000, (6): 524-525. DOI: 10.13741/j.cnki.11-1879/o4.2000.06.015.
High aspect ratio and resolution X-ray zoneplate fabrication using both electron beam and X-ray beam exposure technology