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Deflection angle measurement system for microstructure based on microscope optical lever
更新时间：2025-09-01

    • Deflection angle measurement system for microstructure based on microscope optical lever

    • Vol. 40, Issue 3, Pages: 219-224(2014)

    • DOI：10.13741/j.cnki.11-1879/o4.2014.03.006    

      CLC：

    • Published：2014

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  • Deflection angle measurement system for microstructure based on microscope optical lever[J]. 2014, 40(3): 219-224. DOI： 10.13741/j.cnki.11-1879/o4.2014.03.006.

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