Minor surface deformation measurement based on two-step generalized phase-shifting interferometry[J]. 2018, 44(2): 252-256.
DOI:
Minor surface deformation measurement based on two-step generalized phase-shifting interferometry[J]. 2018, 44(2): 252-256. DOI: 10.13741/j.cnki.11-1879/o4.2018.02.023.
Minor surface deformation measurement based on two-step generalized phase-shifting interferometry