宋登元. 超大规模集成电路光学光刻技术的现状与展望[J]. 光学技术, 1991,(1).

Status and Perspective of Optical Lithographic Technology for Very Large Scale Integration(VLSI)[J]. 1991, (1).

宋登元. 超大规模集成电路光学光刻技术的现状与展望[J]. 光学技术, 1991,(1). DOI：

Status and Perspective of Optical Lithographic Technology for Very Large Scale Integration(VLSI)[J]. 1991, (1). DOI：