基于镜像重构的差动共焦快速曲面测量方法

朱子腾; 刘昱含; 张晓程; 邱丽荣

doi:null

您当前的位置：

首页 >

文章列表页 >

基于镜像重构的差动共焦快速曲面测量方法

北京理工大学85周年校庆专栏 | 更新时间：2025-09-22

- 基于镜像重构的差动共焦快速曲面测量方法
- Differential confocal fast surface measurement based on mirror image reconstruction
- 光学技术 2025年51卷第5期页码：533-540
- 作者机构：
  
  北京理工大学光电学院，北京 100081
- 作者简介：
  
  朱子腾（2000— ），女，硕士研究生，从事精密光学测量技术与仪器研究。2820802519@qq.com
  刘昱含（1996— ），男，博士后，博士，从事精密光学测量技术与仪器研究。2449664655@qq.com
- 基金信息：
- DOI：
  中图分类号： TP394.1;TH691.9
- 收稿：2025-04-15，
  
  修回：2025-05-26，
  
  纸质出版：2025-09-20
- 稿件说明：
移动端阅览
朱子腾,刘昱含,张晓程等.基于镜像重构的差动共焦快速曲面测量方法[J].光学技术,2025,51(05):533-540.

ZHU Ziteng,LIU Yuhan,ZHANG Xiaocheng,et al.Differential confocal fast surface measurement based on mirror image reconstruction[J].OPTICAL TECHNIQUE,2025,51(05):533-540.
朱子腾,刘昱含,张晓程等.基于镜像重构的差动共焦快速曲面测量方法[J].光学技术,2025,51(05):533-540. DOI：

ZHU Ziteng,LIU Yuhan,ZHANG Xiaocheng,et al.Differential confocal fast surface measurement based on mirror image reconstruction[J].OPTICAL TECHNIQUE,2025,51(05):533-540. DOI：

摘要

针对传统差动共焦方法测量复杂曲面精度和效率难以兼顾的问题，提出基于镜像重构的差动共焦快速曲面测量方法，首先对待测曲面进行先导式扫描，利用共焦曲线关于零点对称的特性进行曲线镜像重构，减少扫描行程，提高测量效率；进行精扫描，依据差动共焦曲线的过零点精确对应待测曲面特征点的特性，保证对曲面表面的高精度定焦。方法无需复杂的硬件改造，突破测量时对线性区间的依赖，经实验验证，所提方法所测面形结果的RMS值为13.8nm

保证了测量精度，且与传统方法所测表面误差主要特征分布接近，测量效率提高到传统方法的2倍以上，为复杂表面的快速精密测量提供一种新的有效途径。

Abstract

In response to the difficulty of balancing accuracy and efficiency in measuring complex surfaces using traditional differential confocal methods

a proposes a differential confocal rapid surface measurement method based on mirror reconstruction is proposed. Firstly

the surface to be measured is scanned in a pilot manner

and the curve mirror reconstruction is carried out using the symmetry of the confocal curve about the zero point to reduce the scanning stroke and improve measurement efficiency; Perform precise scanning based on the zero crossing point of the differential confocal curve to accurately correspond to the characteristics of the feature points of the measured surface

ensuring high-precision focusing of the surface. This method does not require complex hardware modifications and breaks through the dependence on linear intervals during measurement. Through experimental verification

the RMS value of the surface shape results measured by this method is 13.8nm

ensuring measurement accuracy and approaching the main characteristic distribution of surface errors measured by traditional methods. The measurement efficiency is improved by more than twice that of traditional methods

providing a new and effective approach for rapid and precise measurement of complex surfaces.

关键词

Keywords

references

Yang T , Zhu J , Hou W , et al . Design method of freeform off-axis reflective imaging systems with a direct construction process [J ] . Opt Express , 2014 , 22 （ 8 ）: 9193 — 205 .

Lei C , Cheng D , Xu C , et al . Optical design for off-axis three-mirror two-channel imaging system with freeform surfaces [C ] // International Symposium on Optoelectronic Technology and Application 2016 . Beijing, China ： IEEE , 2016 .

Gannon C , Liang R . Using spherical harmonics to describe large-angle freeform lenses [J ] . Appl Opt , 2018 , 57 （ 28 ）: 8143 - 7 .

Cheng D , Wang Y , Huated d H , et al . Design of a wide-angle, lightweight head-mounisplay using free-form optics tiling [J ] . Optics Letters , 2011 , 36 （ 11 ）: 2098 — 100 .

Zwick S , Heist S , Franzl Y , et al . Wide-band phase-shifting fringe projector on the basis of a tailored free-form mirror [J ] . Opt Eng , 2013 , 52 （ 2 ）: 023001 - 023001 .

Kumar S , Tong Z , Jiang X Q . Advances in the design and manufacturing of novel freeform optics [J ] . Int J Extreme Manuf , 2022 , 4 （ 3 ）: 33 .

Sieber I , Yi A , Li L K , et al . Design of freeform optics for an ophthalmological application [C ] // Proceedings of the Conference on Optical Modelling and Design III . Brussels, Belgium : Spie-Int Soc Optical Engineering: Bellingham , 2014 .

Wang M , Zhao G , Shi Q , et al . Design methods and applications of freeform surface imaging optical systems [J ] . Acta Optica Sinica , 2023 , 43 （ 8 ）: 0822012

Yang T , Duan Y , Cheng D , et al . Freeform imaging optical system design:theories,development,and applications [J ] . Acta Optica Sinica , 2021 , 41 （ 1 ）: 0108001

Ye J F , Chen L , Li X H , et al . Review of optical freeform surface representation technique and its application [J ] . Opt Eng , 2017 , 56 （ 11 ）: 110901（1—15 ）

Zhu R , Sun Y , Shen H . Progress and prospect of optical freeform surface measurement [J ] . Acta Optica Sinica , 2021 , 41 （ 1 ）: 0112001

Li Z , Zhang X , Yu Y . Precise surface form measurements of off-axis aspheric freeform optics [M ] . SPIE , 2023 .

Liu Y H , Zhang X C , Fu Y , et al . A normal tracking differential confocal measurement method for multiple geometric parameters of hemispherical shell resonator with a common reference [J ] . Meas Sci Technol , 2024 , 35 （ 4 ）: 045013

Zhang X , Qiu L , Zhao W , et al . Free-form surface measurement with laser differential confocal precise positioning [J ] . Optics & Laser Technology , 2025 , 183 : 112325 .

Yu S , Wang Z , Qiu L , et al . Development of laser scanning lateral differential confocal microscopic system [J ] . Acta Optica Sinica , 2024 , 44 （ 22 ）: 2211002

Yang Z , Yang S , Li R , et al . Nonholonomic spherical stitching measurement method for large-aperture angles based on differential confocal precise surface fixation [J ] . Optics and Laser Technology , 2024 , 168 : 109892

Fusheng Wang , Jiubin Tan , Weiqian Zhao . Optical probe using differential confocal technique for surface profile [C ] // Process Control and Inspection for Industry . Beijing, Peoples R China : Spie-Int Soc Optical Engineering: Bel IEEE , 2000 .

Zhang X , Liu Y , Fu Y , et al . Free-form measurement method based on differential confocal sensing and CCD image [J ] . Measurement , 2024 , 237 : 115134

翁川 , 尹自强 . 一种二级曲面测量装置的设计及其不确定度的标定 [J ] . 电子测量与仪器学报 , 2022 , 36 （ 10 ）: 39 — 48 .

Weng Chuan , Yin Ziqiang . Design of a two-stage surface measuring device and its uncertainty calibration [J ] . Journal of Electronic Measurement and Instrumentation , 2022 , 36 （ 10 ）: 39 — 48 .

Lai D , Kong L , Lian G , et al . Differential confocal measurement method of linear scanning based on dual linear array camera [J ] . Journal of Applied Optics , 2022 , 43 （ 2 ）: 98 — 303 .

Sun R , Qiu L , Yang J , et al . Laser differential confocal radius measurement system [J ] . Appl Opt , 2012 , 51 （ 26 ）: 6275 — 81 .

李志刚 , 赵维谦 . 高精度激光差动共焦超长焦距测量方法与技术研究 [J ] . 机械工程学报 , 2019 , 55 （ 06 ）: 10 .

Li Zhigang , Zhao Weiqian . Research on measurement method and technology of high-precision laser differential confocal ultra-long focal length [J ] . Journal of Mechanical Engineering , 2019 , 55 （ 06 ）: 10 .

Luo J , Liu Z , Liu Y , et al . Differential confocal profile tracking measurement method based on Kalman prediction [J ] . Chinese Journal of Scientific Instrument , 2023 , 44 （ 3 ）: 25 — 32 .

Tan J B , Liu C G , Liu J , et al . Sinc<SUP>2</SUP> fitting for height extraction in confocal scanning [J ] . Meas Sci Technol , 2016 , 27 （ 2 ）: 6 .

李臣亮 , 胡新奇 . 计算扩展目标夏克-哈特曼波前传感器子图像偏移量的相关函数质心法研究 [J ] . 光学学报 , 2017 , 37 （ 09 ）: 311 — 6 .

Li Chenliang , Hu Xinqi . Study on centroid method of correlation function for calculating subimage offset of extended target shak-hartmann wavefront sensor [J ] . Acta Optica Sinica , 2017 , 37 （ 09 ）: 311 — 6

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据