白光干涉信号的分段拟合优化方法研究

张昊; 韦晓孝; 范淼; 陈锦涛

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白光干涉信号的分段拟合优化方法研究

光学传感与测量 | 更新时间：2026-01-05

- 白光干涉信号的分段拟合优化方法研究
- Research on segmented fitting optimization method for white light interference signals
- 光学技术 2025年51卷第6期页码：704-709
- 作者机构：
  
  上海理工大学光电信息与计算机工程学院，上海 200093
- 作者简介：
  
  张昊（1999— ），男，硕士研究生，从事光学设计等方面研究。zh1220_edu@163.com
  weixx@usst.edu.cn
- 基金信息：
  
  国家重点研发计划“基础科研条件与重大科学仪器设备研发”重点专项(2021YFF0700400)
- DOI：
  中图分类号： TP394.1;TH691.9
- 收稿：2025-05-28，
  
  修回：2025-09-15，
  
  纸质出版：2025-11-20
- 稿件说明：
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张昊,韦晓孝,范淼等.白光干涉信号的分段拟合优化方法研究[J].光学技术,2025,51(06):704-709.

ZHANG Hao,WEI Xiaoxiao,FAN Miao,et al.Research on segmented fitting optimization method for white light interference signals[J].OPTICAL TECHNIQUE,2025,51(06):704-709.
张昊,韦晓孝,范淼等.白光干涉信号的分段拟合优化方法研究[J].光学技术,2025,51(06):704-709. DOI：

ZHANG Hao,WEI Xiaoxiao,FAN Miao,et al.Research on segmented fitting optimization method for white light interference signals[J].OPTICAL TECHNIQUE,2025,51(06):704-709. DOI：

摘要

白光扫描干涉技术是一种高精度、非接触式的三维测量方法，但在大行程扫描和复杂测量环境下易受到振动和非线性扫描误差影响，导致采样信号呈现非均匀分布，从而降低传统拟合算法的稳定性与计算效率。文章针对非均匀采样带来的信号畸变问题，提出了一种基于感兴趣区域（ROI）分段的傅里叶级数拟合优化方法。方法首先通过粗略峰值定位快速确定干涉信号的有效区域，剔除无效背景区段，并结合多线程并行计算策略对信号进行分段拟合与重构，有效降低了拟合阶数与计算开销。仿真结果表明，该方法在保证重构精度的同时，计算效率显著提升。在实际大高差台阶量块测量中，重构高度与参考值误差小于0.5%，总耗时仅为传统方法的约1/44。实验验证了方法在大数据量和低占空比条件下具备优越的稳定性与可扩展性，具有良好的工程应用前景。

Abstract

White light scanning interferometry is a high-precision

non-contact 3D measurement technique. However

in scenarios involving large-range scanning and complex measurement environments

it is susceptible to vibrations and nonlinear scanning errors

which lead to non-uniformly distributed sampling signals. This in turn degrades the stability and computational efficiency of traditional fitting algorithms. To address the signal distortion caused by non-uniform sampling

an optimized Fourier series fitting method based on region of interest segmentation is proposed. The method first performs coarse peak localization to quickly identify the effective region of the interference signal

eliminating invalid background segments. It then applies a multithreaded parallel computing strategy to perform segmented fitting and reconstruction

effectively reducing the fitting order and computational cost. Simulation results demonstrate that the proposed method significantly improves computational efficiency while maintaining reconstruction accuracy. In practical measurements of large-step height gauge blocks

the reconstruction error is less than 0.5% compared to reference values

and the total computation time is approximately 1/44 of that required by traditional methods. Experimental results validate the method's superior stability and scalability under conditions of large data volumes and low duty cycles

indicating strong potential for engineering applications.

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references

张超 , 张永红 , 毛树根 , 范琛晰 . 航空燃油喷嘴设计构造及光学检测技术研究 [J ] . 中国机械 , 2024 ,（ 09 ）: 10 — 13 .

Zhang Chao , Zhang Yonghong , Mao Shugen ， et al . Study on the structural design and optical inspection techniques of aviation fuel nozzles [J ] . China Mechanical Engineering , 2024 ,（ 09 ）: 10 — 13 .

Zhang W , Zhang H , Meng K , et al . Research on coherent light measurement based on white light interferometry for semiconductor industry [C ] // Speckle 2023: VIII International Conference on Speckle Metrology:SPIE , 2024 : 166 — 171 .

Bhatt S , Butola A , Kanade S R , et al . High‐resolution single‐shot phase‐shifting interference microscopy using deep neural network for quantitative phase imaging of biological samples [J ] . Journal of Biophotonics , 2021 , 14 （ 7 ）: e202000473 .

王盛 , 赵清亮 , 王生 , 等 . 蓝宝石复杂表面光学元件精密-超精密磨削机理及关键技术研究进展 [J ] . 航空制造技术 , 2022 , 65 （ 09 ）: 69 — 80 .

Wang Sheng , Zhao Qing Liang , Wang Sheng , et al . Research progress on precision and ultra-precision grinding mechanism and key technology on sapphire optical elements with complex surface [J ] . Aeronautical Manufacturing Technology , 2022 , 65 （ 09 ）: 69 — 80 .

Tereschenko S , Lehmann P , Zellmer L , et al . Passive vibration compensation in scanning white-light interferometry [J ] . Applied Optics , 2016 , 55 （ 23 ）: 6172 - 6182 .

Ai C , Novak E L . Centroid approach for estimating modulation peak in broad-bandwidth interferometry : U S 5633715 [P ] . 1997-5—27 .

Sandoz P . Wavelet transform as a processing tool in white-light interferometry [J ] . Optics letters , 1997 , 22 （ 14 ）: 1065 — 1067 .

薛亮 , 郭仁慧 , 刘杨 , 等 . 基于非均匀快速傅里叶变换的抗振动白光干涉测量方法 [J ] . 光学学报 , 2024 , 44 （ 04 ）: 204 — 214 .

Xue Liang , Guo Renhui , Liu Yang , et al . Anti-vibration white light interferometry based on non-uniform fast fourier transform [J ] . Acta Optica Sinica , 2024 , 44 （ 04 ）: 204 — 214 .

马雨濛 . 白光干涉信号解调性能优化方法研究 [D ] , 哈尔滨 : 哈尔滨工业大学 , 2024 .

Ma Yumeng . Study on optimization methods for demodulationperformance of white light interference signals [D ] , Harbin : Harbin Engineering University , 2024 .

Luo S , Suzuki T , Sasaki O , et al . Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement [J ] . Applied Optics , 2019 , 58 （ 13 ）: 3548 — 3554 .

Breinbjerg O . Derivative sampling of periodic and non-periodic band-limited signals-fourier spectrum and interpolation formula [J ] . IEEE Transactions on Antennas and Propagation , 2024 , 72 （ 10 ）: 7821 — 7829 .

苏榕 , 刘嘉宇 , 乔潇悦 , 等 . 用于表面形貌测量的扫描白光干涉技术进展 [J ] . 激光与光电子学进展 , 2023 , 60 （ 03 ）: 70 — 90 .

Su Rong , Liu Jiayu , Qiao Xiaoyue , et al . Advances in scanning white light interferometry for surface topography measurement [J ] . Laser & Optoelectronics Progress , 2023 , 60 （ 03 ）: 70 — 90 .

Coppé V , Huybrechs D . Efficient function approximation on general bounded domains using splines on a Cartesian grid [J ] . Advances in Computational Mathematics , 2022 , 48 （ 5 ）: 62 .

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