基于方波调制与周期波形分析的热反射金属薄膜测厚方法

冯昶武; 张炳江; 余为; 江普庆

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基于方波调制与周期波形分析的热反射金属薄膜测厚方法

光学传感与测量 | 更新时间：2026-07-23

- 基于方波调制与周期波形分析的热反射金属薄膜测厚方法
- Square-wave modulation thermoreflectance for metal film thickness measurement
- 光学技术 2026年52卷第4期页码：428-433
- 作者机构：
  
  1.华中科技大学能源与动力工程学院，湖北武汉430074
  2.吉林大学汽车工程学院，吉林长春 130022
  3.瑞士苏黎世仪器中国分公司，上海 200030
- 作者简介：
  
  冯昶武（2005— ），男，本科生，从事热科学方面研究。
  江普庆（1985— ），男，研究员，工学博士，从事微纳尺度热测量等方面研究。jpq2021@hust.edu.cn
- 基金信息：
  
  国家自然科学基金面上项目(52376058)
- DOI：
  中图分类号： TN206
- 收稿：2026-03-12，
  
  修回：2026-05-13，
  
  录用：2026-06-04，
  
  网络首发：2026-07-23，
  
  纸质出版：2026-07-20
- 稿件说明：
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冯昶武,张炳江,余为等.基于方波调制与周期波形分析的热反射金属薄膜测厚方法[J].光学技术,2026,52(04):428-433.

FENG Changwu,ZHANG Bingjiang,YU Wei,et al.Square-wave modulation thermoreflectance for metal film thickness measurement[J].OPTICAL TECHNIQUE,2026,52(04):428-433.
冯昶武,张炳江,余为等.基于方波调制与周期波形分析的热反射金属薄膜测厚方法[J].光学技术,2026,52(04):428-433. DOI：

FENG Changwu,ZHANG Bingjiang,YU Wei,et al.Square-wave modulation thermoreflectance for metal film thickness measurement[J].OPTICAL TECHNIQUE,2026,52(04):428-433. DOI：

摘要

针对常规热反射技术（TDTR/FDTR）在测量光学不透明金属薄膜厚度时对高热反射系数材料（如铝、金）存在依赖、难以拓展至银、铜等低热反射系数材料的瓶颈，提出一种基于方波调制加热与周期性波形分析仪（PWA）幅值探测的非接触测量方法。通过谐波能量充分利用与深度相位平均，显著提升了低热反射系数材料的信噪比。针对熔融石英衬底上~200nm银膜/铜膜，采用双频测量实现参数解耦，测量厚度与SEM标定值偏差

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https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=113596829&type=

8.38199997

2.96333337

。方法突破了常规热反射对金属种类的限制，填补了椭偏仪等光学干涉方法在不透明金属膜厚度测量上的盲区，为超薄金属膜在线监测提供了有效手段。

Abstract

Conventional thermoreflectance techniques （TDTR/FDTR） exhibit a selective dependence on high-thermoreflectance metals （such as aluminum and gold） when measuring the thickness of optically opaque metal films

making it difficult to extend to low-thermoreflectance materials like silver and copper. To address this bottleneck

a non-contact measurement method is presented employing square-wave modulated heating and periodic waveform analyzer （PWA） amplitude detection. By exploiting the rich harmonic content of square waves and deep phase averaging

the signal-to-noise ratio is significantly enhanced for low-thermoreflectance materials. A dual-frequency measurement strategy enables effective parameter decoupling. Validation on ~200 nm silver and copper films deposited on fused silica substrates yields measured thickness with deviations within 5% from SEM reference values. This approach breaks through the material-selective restriction of conventional thermoreflectance methods

bridging the capability gap for optically opaque metal films where ellipsometry is ineffective

and provides an effective technique for nondestructive online thickness monitoring.

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references

Yun J . Ultrathin metal films for transparent electrodes of flexible optoelectronic devices [J ] . Advanced Functional Materials , 2017 , 27 （ 18 ）: 1606641 .

Kang G , Kwon G , Jeon J , et al . Electromagnetic interference shielding using metal and MXene thin films [J ] . Nature , 2025 , 647 （ 8089 ）: 356 — 363 .

Chen Z , Yang S , Huang J , et al . Flexible, transparent and conductive metal mesh films with ultra-high FoM for stretchable heating and electromagnetic interference shielding [J ] . Nano-Micro Letters , 2024 , 16 （ 1 ）: 92 .

Ma D , Ji M , Yi H , et al . Pushing the thinness limit of silver films for flexible optoelectronic devices via ion-beam thinning-back process [J ] . Nature Communications , 2024 , 15 （ 1 ）: 2248 .

Wen S , Xue X , Wang S , et al . Metasurface array for single-shot spectroscopic ellipsometry [J ] . Light: Science & Applications , 2024 , 13 （ 1 ）: 88 .

任飞旭 , 曲国峰 , 张鑫 , 等 . 基于扫描电镜和能谱仪的薄膜表面形貌和厚度同时测量研究 [J ] . 分析科学学报 , 2023 , （ 3 ）: 355 — 360 .

Ren Feixu , Qu Guofeng , Zhang Xin , et al . Simultaneous measurement of thin film surface morphology and thickness based on scanning electron microscope and energy dispersive spectrometer [J ] . Journal of Analytical Science , 2023 （ 3 ）: 355 — 360 .

Beltrán-Pitarch B , Guralnik B , Borup K A , et al . Temperature coefficient of resistance and thermal boundary conductance determination of ruthenium thin films by micro four-point probe [J ] . Measurement Science and Technology , 2024 , 35 （ 6 ）: 066012 .

Sitko R . Quantitative X-ray fluorescence analysis of samples of less than ‘infinite thickness’: Difficulties and possibilities [J ] . Spectrochimica Acta Part B: Atomic Spectroscopy , 2009 , 64 （ 11-12 ）: 1161 — 1172 .

Cahill D G . Analysis of heat flow in layered structures for time-domain thermoreflectance [J ] . Review of Scientific Instruments , 2004 , 75 （ 12 ）: 5119 — 5122 .

Schmidt A J , Cheaito R , Chiesa M . Characterization of thin metal films via frequency-domain thermoreflectance [J ] . Journal of Applied Physics , 2010 , 107 （ 2 ）: 024908 .

Jiang P , Huang B , Koh Y K . Accurate measurements of cross-plane thermal conductivity of thin films by dual-frequency time-domain thermoreflectance （TDTR） [J ] . Review of Scientific Instruments , 2016 , 87 （ 7 ）: 075101 .

Regner K T , Majumdar S , Malen J A . Instrumentation of broadband frequency domain thermoreflectance for measuring thermal conductivity accumulation functions [J ] . Review of Scientific Instruments , 2013 , 84 （ 6 ）: 064901 .

Wilson R B , Apgar B A , Martin L W , et al . Thermoreflectance of metal transducers for optical pump-probe studies of thermal properties [J ] . Optics Express , 2012 , 20 （ 27 ）: 28829 .

A quantitative SNR comparison : Lock-in amplifier vs . Boxcar averager | zurich instruments [EB/OL ] . [ 2026-05-12 ] . https://www.zhinst.cn/china/en/blogs/quantitative-snr-comparison-lock-in-amplifier-vs-boxcar-averager/ https://www.zhinst.cn/china/en/blogs/quantitative-snr-comparison-lock-in-amplifier-vs-boxcar-averager/ .

Zurich Instruments . Principles of boxcar averaging （White Paper） [R ] . Zurich Instruments , 2021 .

陈韬 , 江普庆 . 揭示热反射实验中热物性参数的本征关系 [J ] . 物理学报 , 2024 , 73 （ 23 ）: 230202 .

Chen Tao , Jiang Puqing . Unraveling intrinsic relationship of thermal properties in thermoreflectance experiments [J ] . Acta Physica Sinica , 2024 , 73 （ 23 ）: 230202

Chen T , Jiang P . Decoupling thermal properties in multilayered systems for advanced thermoreflectance experiments [J ] . Physical Review Applied , 2025 , 23 （ 4 ）: 044004 .

Touloukian Y , Buyco E . Thermophysical properties of matter-the tprc data series . volume 4 . specific heat-metallic elements and alloys[M ] . DTIC Document , New York, Washington ; 1971.

Touloukian Y , Powell R , Ho C , et al . Thermophysical properties of matter-the TPRC data series . volume 2 . thermal conductivity nonmetallic solids[M ] . IFI/Plenum , New York, Washington , 1970.

Touloukian Y , Buyco E . Thermophysical properties of matter-the tprc data series . volume 5 . specific heat-nonmetallic solids[M ] . New York, Washington : DTIC Document , 1971.

Jiang P , Wang D , Xiang Z , et al . A new spatial-domain thermoreflectance method to measure a broad range of anisotropic in-plane thermal conductivity [J ] . International Journal of Heat and Mass Transfer , 2022 , 191 : 122849 .

Ashcroft N , Mermin N . Solid state physics [M ] . Saunders College , 1976 .

Jain A , McGaughey A J . Thermal transport by phonons and electrons in aluminum, silver, and gold from first principles [J ] . Physical Review B , 2016 , 93 （ 8 ）: 081206 .

Chen T , Song S , Shen Y , et al . Simultaneous measurement of thermal conductivity and heat capacity across diverse materials using the square-pulsed source （SPS） technique [J ] . International Communications in Heat and Mass Transfer , 2024 , 158 : 107849 .

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