高分辨白光干涉-共焦显微三维形貌测量传感器研制

杨瑞; 贺佳怡; 于福禄; 杨翌明; 杨昌云; 杨帅

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高分辨白光干涉-共焦显微三维形貌测量传感器研制

光学传感与测量 | 更新时间：2026-07-23

- 高分辨白光干涉-共焦显微三维形貌测量传感器研制
- Development of a high-resolution white-light interference and confocal microscopic sensor for three-dimensional surface topography measurement
- 光学技术 2026年52卷第4期页码：434-442
- 作者机构：
  
  北京理工大学光电学院北京 100081
- 作者简介：
  
  杨瑞（2000— ），女，硕士研究生，从事激光差动共焦-干涉精密测量研究。yr17631721896@163.com
  杨帅（1994— ），男，特别副研究员，从事激光差动共焦-干涉精密测量研究。yangshuai_bit@163.com
- 基金信息：
  
  国家自然科学基金(62405020)
- DOI：
  中图分类号： TP394.1;TH691.9
- 收稿：2026-04-21，
  
  修回：2026-05-14，
  
  录用：2026-05-19，
  
  网络首发：2026-07-23，
  
  纸质出版：2026-07-20
- 稿件说明：
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杨瑞,贺佳怡,于福禄等.高分辨白光干涉-共焦显微三维形貌测量传感器研制[J].光学技术,2026,52(04):434-442.

YANG Rui,HE Jiayi,YU Fulu,et al.Development of a high-resolution white-light interference and confocal microscopic sensor for three-dimensional surface topography measurement[J].OPTICAL TECHNIQUE,2026,52(04):434-442.
杨瑞,贺佳怡,于福禄等.高分辨白光干涉-共焦显微三维形貌测量传感器研制[J].光学技术,2026,52(04):434-442. DOI：

YANG Rui,HE Jiayi,YU Fulu,et al.Development of a high-resolution white-light interference and confocal microscopic sensor for three-dimensional surface topography measurement[J].OPTICAL TECHNIQUE,2026,52(04):434-442. DOI：

摘要

针对单一测量模式难以同时满足不同复杂微纳结构的高空间分辨成像检测问题，提出了基于白光干涉与共焦双光路融合原理的高分辨三维形貌成像检测方法。方法通过分光棱镜与共用管镜实现白光/激光照明/探测光路的同轴合束与空间复用，并引入振镜实现共焦模式下的横向快速扫描。系统可实现两种测量模式的原位切换，以白光干涉技术实现大范围形貌的纳米级测量，以共焦技术实现复杂边缘的精细定位，从而将白光干涉的高轴向分辨力优势与共焦技术的高横向分辨力特性相结合，实现了针对不同微纳结构的高精度三维形貌测量。基于该方法研制了小型化多模式白光干涉-共焦测量传感器系统，实验结果表明，系统可实现双模式三维形貌测量；光滑平面测试中轴向重复性小于2 nm，标准台阶光栅测试中高度标准差小于标称高度的2%。将白光干涉与共焦结合应用于微纳测量领域，为微纳结构三维形貌的高效、精密测量提供了参考。

Abstract

To address the difficulty of a single measurement mode in simultaneously meeting the high-spatial-resolution imaging and inspection requirements of diverse complex micro/nanostructures

a high-resolution three-dimensional topography imaging and measurement method based on the dual-optical-path integration of white-light interferometry and confocal microscopy is proposed. In this method

a beam-splitting prism and a shared tube lens are used to realize coaxial beam combination and spatial multiplexing of the white-light/laser illumination and detection paths

while a galvanometer is introduced to achieve rapid lateral scanning in the confocal mode. The system enables in situ switching between the two measurement modes. White-light interferometry is used for nanometer-scale measurement of large-area surface topography

whereas confocal microscopy is used for precise localization of complex edges. In this way

the high axial resolution of white-light interferometry is combined with the high lateral resolution of confocal microscopy

enabling high-precision three-dimensional topography measurement of different micro/nanostructures. Based on this method

a miniaturized multimode white-light-interferometry/confocal measurement sensor system was developed. Experimental results show that the system can realize dual-mode three-dimensional topography measurement. In the smooth-plane test

the axial repeatability was better than 2 nm

and in the standard step-grating test

the height standard deviation was less than 2% of the nominal height. The integration of white-light interferometry and confocal microscopy in micro/nano measurement provides a reference for efficient and precise three-dimensional topography measurement of micro/nanostructures.

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references

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